Plasma Systems for Etching

RISE is procuring one or two agreements (each the “Agreement”) for the delivery and commissioning of two separate pieces of equipment that will be placed in a cleanroom and used for research and development as well as small-scale manufacturing of semiconductor components: 1. One inductively coupled plasma system for etching …

CPV: 42990000 Diverse machines voor specifieke doeleinden, 31000000 Elektrische machines, apparaten, uitrusting en verbruiksartikelen; verlichting, 42900000 Diverse machines voor algemeen en specifiek gebruik
Deadline:
22 mei 2025 21:59
Soort termijn:
Indiening van een bod
Plaats van uitvoering:
Plasma Systems for Etching
Toekennende instantie:
RISE RESEARCH INSTITUTES OF SWEDEN AB
Gunningsnummer:
25/30

1. Buyer

1.1 Buyer

Official name : RISE RESEARCH INSTITUTES OF SWEDEN AB
Legal type of the buyer : Central government authority
Activity of the contracting authority : General public services

2. Procedure

2.1 Procedure

Title : Plasma Systems for Etching
Description : RISE is procuring one or two agreements (each the “Agreement”) for the delivery and commissioning of two separate pieces of equipment that will be placed in a cleanroom and used for research and development as well as small-scale manufacturing of semiconductor components: 1. One inductively coupled plasma system for etching III-V materials; and 2. One plasma system for RIE etching of dielectrics like SiO and SiN. The two systems are procured through two separate lots.
Procedure identifier : 6cfc6264-b476-44d9-85da-367339aad806
Internal identifier : 25/30
Type of procedure : Open
The procedure is accelerated : no
Justification for the accelerated procedure :
Main features of the procedure :

2.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 42990000 Miscellaneous special-purpose machinery
Additional classification ( cpv ): 31000000 Electrical machinery, apparatus, equipment and consumables; lighting

2.1.2 Place of performance

Country subdivision (NUTS) : Stockholms län ( SE110 )
Country : Sweden

2.1.3 Value

Estimated value excluding VAT : 16 000 000 Swedish krona

2.1.4 General information

Legal basis :
Directive 2014/24/EU

2.1.5 Terms of procurement

Terms of submission :
The tenderer must submit tenders for all lots

2.1.6 Grounds for exclusion

Payment of taxes : According to LOU

5. Lot

5.1 Lot technical ID : LOT-0001

Title : ICP/RIE
Description : RISE is procuring one or two agreements (each the “Agreement”) for the delivery and commissioning of two separate pieces of equipment that will be placed in a cleanroom and used for research and development as well as small-scale manufacturing of semiconductor components: 1. One inductively coupled plasma system for etching III-V materials; and 2. One plasma system for RIE etching of dielectrics like SiO and SiN.
Internal identifier : 1684424

5.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 42900000 Miscellaneous general and special-purpose machinery
Additional classification ( cpv ): 31000000 Electrical machinery, apparatus, equipment and consumables; lighting

5.1.2 Place of performance

Country subdivision (NUTS) : Stockholms län ( SE110 )
Country : Sweden
Additional information :

5.1.3 Estimated duration

Duration : 12 Month

5.1.5 Value

Estimated value excluding VAT : 16 000 000 Swedish krona

5.1.6 General information

Reserved participation : Participation is not reserved.
Procurement Project not financed with EU Funds.
The procurement is covered by the Government Procurement Agreement (GPA) : no

5.1.7 Strategic procurement

Aim of strategic procurement : No strategic procurement

5.1.9 Selection criteria

Criterion :
Type : Economic and financial standing
Use of this criterion : Not used
Criterion :
Type : Economic and financial standing
Use of this criterion : Not used
Criterion :
Type : Economic and financial standing
Use of this criterion : Not used
Criterion :
Type : Suitability to pursue the professional activity
Name : Quality
Description : Suitability for purpose.
Use of this criterion : Used
Criterion :
Type : Suitability to pursue the professional activity
Use of this criterion : Not used
Criterion :
Type : Suitability to pursue the professional activity
Use of this criterion : Not used
Criterion :
Type : Technical and professional ability
Use of this criterion : Not used

5.1.11 Procurement documents

Deadline for requesting additional information : 11/05/2025 22:00 +00:00
Address of the procurement documents : https://tendsign.com/doc.aspx?MeFormsNoticeId=55575

5.1.12 Terms of procurement

Terms of submission :
Electronic submission : Required
Languages in which tenders or requests to participate may be submitted : English, Swedish
Electronic catalogue : Allowed
Deadline for receipt of tenders : 22/05/2025 21:59 +00:00
Deadline until which the tender must remain valid : 89 Day
Information about public opening :
Opening date : 22/05/2025 22:00 +00:00
Place : RISE AB
Terms of contract :
The execution of the contract must be performed within the framework of sheltered employment programmes : No
Electronic invoicing : Required
Electronic ordering will be used : yes
Electronic payment will be used : yes

5.1.15 Techniques

Framework agreement :
No framework agreement
Information about the dynamic purchasing system :
No dynamic purchase system

5.1.16 Further information, mediation and review

Review organisation : Förvaltningsrätten -
Information about review deadlines : N/A

5.1 Lot technical ID : LOT-0002

Title : Tenderer information
Description : RISE is procuring one or two agreements (each the “Agreement”) for the delivery and commissioning of two separate pieces of equipment that will be placed in a cleanroom and used for research and development as well as small-scale manufacturing of semiconductor components: 1. One inductively coupled plasma system for etching III-V materials; and 2. One plasma system for RIE etching of dielectrics like SiO and SiN.
Internal identifier : 1684425

5.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 42900000 Miscellaneous general and special-purpose machinery
Additional classification ( cpv ): 31000000 Electrical machinery, apparatus, equipment and consumables; lighting

5.1.2 Place of performance

Country subdivision (NUTS) : Stockholms län ( SE110 )
Country : Sweden
Additional information :

5.1.3 Estimated duration

Duration : 12 Month

5.1.5 Value

Estimated value excluding VAT : 16 000 000 Swedish krona

5.1.6 General information

Reserved participation : Participation is not reserved.
Procurement Project not financed with EU Funds.
The procurement is covered by the Government Procurement Agreement (GPA) : no

5.1.7 Strategic procurement

Aim of strategic procurement : No strategic procurement

5.1.9 Selection criteria

Criterion :
Type : Economic and financial standing
Use of this criterion : Not used
Criterion :
Type : Economic and financial standing
Use of this criterion : Not used
Criterion :
Type : Economic and financial standing
Use of this criterion : Not used
Criterion :
Type : Suitability to pursue the professional activity
Name : Quality
Description : Suitability for purpose.
Use of this criterion : Used
Criterion :
Type : Technical and professional ability
Use of this criterion : Not used

5.1.11 Procurement documents

Deadline for requesting additional information : 11/05/2025 22:00 +00:00
Address of the procurement documents : https://tendsign.com/doc.aspx?MeFormsNoticeId=55575

5.1.12 Terms of procurement

Terms of submission :
Electronic submission : Required
Languages in which tenders or requests to participate may be submitted : English, Swedish
Electronic catalogue : Allowed
Deadline for receipt of tenders : 22/05/2025 21:59 +00:00
Deadline until which the tender must remain valid : 89 Day
Information about public opening :
Opening date : 22/05/2025 22:00 +00:00
Place : RISE AB
Terms of contract :
The execution of the contract must be performed within the framework of sheltered employment programmes : No
Electronic invoicing : Required
Electronic ordering will be used : yes
Electronic payment will be used : yes

5.1.15 Techniques

Framework agreement :
No framework agreement
Information about the dynamic purchasing system :
No dynamic purchase system

5.1.16 Further information, mediation and review

Review organisation : Förvaltningsrätten -
Information about review deadlines : N/A

8. Organisations

8.1 ORG-0001

Official name : RISE RESEARCH INSTITUTES OF SWEDEN AB
Registration number : 5564646874
Department : Upphandlingskonsult Stockholm
Postal address : Box 857
Town : BORÅS
Postcode : 50115
Country subdivision (NUTS) : Stockholms län ( SE110 )
Country : Sweden
Contact point : Erik Årling
Telephone : 010-5165000
Internet address : http://www.ri.se
Roles of this organisation :
Buyer

8.1 ORG-0002

Official name : Förvaltningsrätten
Registration number : 202100-2742
Postal address : Box 53197
Town : Göteborg
Postcode : 400 15
Country subdivision (NUTS) : Västra Götalands län ( SE232 )
Country : Sweden
Telephone : 031-732 70 00
Roles of this organisation :
Review organisation
Notice information
Notice identifier/version : ba86d16a-b8c7-4134-b937-7498f4152331 - 01
Form type : Competition
Notice type : Contract or concession notice – standard regime
Notice dispatch date : 22/04/2025 10:35 +00:00
Notice dispatch date (eSender) : 22/04/2025 10:35 +00:00
Languages in which this notice is officially available : English
Notice publication number : 00262625-2025
OJ S issue number : 79/2025
Publication date : 23/04/2025