tender for a batch spray tool

DTU Nanolab requires one spray tool equipped with ozone, HF, HCl and NH4OH for wafer cleaning purposes. The tool is to be able to handle batch processing (up to 25 wafers per run). The tool will be used in our ISO 14644-1 Class 4 and 5 clean room. The tool …

CPV: 38000000 Laboratory, optical and precision equipments (excl. glasses)
Place of execution:
tender for a batch spray tool
Awarding body:
Danmarks Tekniske Universitet - DTU
Award number:
9868

1. Buyer

1.1 Buyer

Official name : Danmarks Tekniske Universitet - DTU
Legal type of the buyer : Body governed by public law
Activity of the contracting authority : Education

2. Procedure

2.1 Procedure

Title : tender for a batch spray tool
Description : DTU Nanolab requires one spray tool equipped with ozone, HF, HCl and NH4OH for wafer cleaning purposes. The tool is to be able to handle batch processing (up to 25 wafers per run). The tool will be used in our ISO 14644-1 Class 4 and 5 clean room. The tool will be used by many different users with diverse backgrounds, which means that operator safety is an important aspect. Another important aspect is the ease of use with special attention on software operation and setup change for different wafer sizes. Please see Appendix 1 Requirement specification for further information.
Procedure identifier : 18754cf1-01c6-4d2d-bd89-430d4e5b9e41
Previous notice : efa4e029-fb1a-4f87-b462-346483740a77-01
Internal identifier : 9868
Type of procedure : Open
The procedure is accelerated : no

2.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)

2.1.2 Place of performance

Country subdivision (NUTS) : Københavns omegn ( DK012 )
Country : Denmark

2.1.3 Value

Estimated value excluding VAT : 1 100 000 Euro

2.1.4 General information

Call for competition is terminated
Additional information : Participation in the tender procedure may only take place by electronic means via the electronic tendering system used by the contracting entity. For access to the tender documents, the tenderer must be registered or register as a user. If the tender contains several versions of the same document, the latest uploaded version will apply. All communication in connection with the tender procedure, including questions and answers, must take place through the electronic tendering system. Reference is made to the Instruction to Tenderers for information concerning questions and answers. Tenderers are requested to keep updated via the electronic tendering system. If the tenderer encounters problems with the system, please contact support by e-mail, dksupport@eu-supply.com , or telephone (+45) 70 20 80 14. Section 134a of the Danish Public Procurement Act shall apply to this tender procedure. The tenderer must submit an ESPD with the tender as preliminary documentation of the circumstances set out in section 148(1), paras (1)-(3) of the Danish Public Procurement Act. It is not necessary for the tenderer to sign the ESPD document. For groups of operators (e.g., a consortium), a separate ESPD must be submitted for each participating operator. Where the tenderer is a group of operators, the ESPD document of each participant in the group must be signed by the participant in question. The tenderer heading the group and submitting the tender is not required to sign its ESPD document. If the tenderer relies on the capacities of other entities, an ESPD must be submitted for and signed by each of the entities on which the tenderer relies. Before the award decision is made, the tenderer to whom the contracting entity intends to award the contract must provide documentation of the information submitted in the ESPD pursuant to sections 151-152, cf. section 153 of the Danish Public Procurement Act or pursuant to section 156, see the Instruction to tenderers The contracting entity may use the procedure of section 159(5) of the Danish Public Procurement Act in the event that tenders do not comply with the requirements of the tender documents. Attention is drawn to Article 5k in Regulation (EU) No 833/2014 as amended which applies to the tender procedure. Tenderers must sign a declaration regarding Regulation (EU) no 833/2014 as amended.
Legal basis :
Directive 2014/24/EU
The Danish Public Procurement Act - Open Procedure

5. Lot

5.1 Lot technical ID : LOT-0000

Title : tender for a batch spray tool
Description : DTU Nanolab requires one spray tool equipped with ozone, HF, HCl and NH4OH for wafer cleaning purposes. The tool is to be able to handle batch processing (up to 25 wafers per run). The tool will be used in our ISO 14644-1 Class 4 and 5 clean room. The tool will be used by many different users with diverse backgrounds, which means that operator safety is an important aspect. Another important aspect is the ease of use with special attention on software operation and setup change for different wafer sizes. Please see Appendix 1 Requirement specification for further information.
Internal identifier : 9868

5.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)
Options :
Description of the options : Options under the Agreement can be purchased as add-ons/activated by DTU within one year after Delivery (completed SAT). The agreement includes two separate options, see appendix 1.1.

5.1.2 Place of performance

Country subdivision (NUTS) : Københavns omegn ( DK012 )
Country : Denmark
Additional information :

5.1.3 Estimated duration

Duration : 1 Year

5.1.5 Value

Estimated value excluding VAT : 1 100 000 Euro

5.1.6 General information

Procurement Project not financed with EU Funds.
The procurement is covered by the Government Procurement Agreement (GPA) : yes
Additional information : Participation in the tender procedure may only take place by electronic means via the electronic tendering system used by the contracting entity. For access to the tender documents, the tenderer must be registered or register as a user. If the tender contains several versions of the same document, the latest uploaded version will apply. All communication in connection with the tender procedure, including questions and answers, must take place through the electronic tendering system. Reference is made to the Instruction to Tenderers for information concerning questions and answers. Tenderers are requested to keep updated via the electronic tendering system. If the tenderer encounters problems with the system, please contact support by e-mail, dksupport@eu-supply.com , or telephone (+45) 70 20 80 14. Section 134a of the Danish Public Procurement Act shall apply to this tender procedure. The tenderer must submit an ESPD with the tender as preliminary documentation of the circumstances set out in section 148(1), paras (1)-(3) of the Danish Public Procurement Act. It is not necessary for the tenderer to sign the ESPD document. For groups of operators (e.g., a consortium), a separate ESPD must be submitted for each participating operator. Where the tenderer is a group of operators, the ESPD document of each participant in the group must be signed by the participant in question. The tenderer heading the group and submitting the tender is not required to sign its ESPD document. If the tenderer relies on the capacities of other entities, an ESPD must be submitted for and signed by each of the entities on which the tenderer relies. Before the award decision is made, the tenderer to whom the contracting entity intends to award the contract must provide documentation of the information submitted in the ESPD pursuant to sections 151-152, cf. section 153 of the Danish Public Procurement Act or pursuant to section 156, see the Instruction to tenderers The contracting entity may use the procedure of section 159(5) of the Danish Public Procurement Act in the event that tenders do not comply with the requirements of the tender documents. Attention is drawn to Article 5k in Regulation (EU) No 833/2014 as amended which applies to the tender procedure. Tenderers must sign a declaration regarding Regulation (EU) no 833/2014 as amended.

5.1.7 Strategic procurement

5.1.10 Award criteria

Criterion :
Type : Price
Name : Price
Description : See instructions to tenderers
Category of award threshold criterion : Weight (percentage, exact)
Award criterion number : 50
Criterion :
Type : Quality
Name : Quality
Description : See instructions to tenderers
Category of award threshold criterion : Weight (percentage, exact)
Award criterion number : 50

5.1.15 Techniques

Framework agreement :
No framework agreement
Information about the dynamic purchasing system :
No dynamic purchase system

5.1.16 Further information, mediation and review

Review organisation : Klagenævnet for Udbud
Information about review deadlines : Complaint regarding the award of a contract must be submitted no later than 45 calendar days from the date after the Contracting Authority has published a notice in the European Union Official Journal informing that the Contracting Authority has awarded/concluded a contract, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 2, no. 1.
Organisation providing more information on the review procedures : Konkurrence- og Forbrugerstyrelsen
Organisation whose budget is used to pay for the contract : Danmarks Tekniske Universitet - DTU
Organisation executing the payment : Danmarks Tekniske Universitet - DTU
Organisation signing the contract : Danmarks Tekniske Universitet - DTU

6. Results

Value of all contracts awarded in this notice : 978 890 Euro

6.1 Result lot ldentifier : LOT-0000

At least one winner was chosen.

6.1.2 Information about winners

Winner :
Official name : Siconnex Customized Solutions GmbH
Tender :
Tender identifier : Tender for a batch spray tool
Identifier of lot or group of lots : LOT-0000
Value of the tender : 978 890 Euro
Subcontracting : No
Contract information :
Identifier of the contract : Tender for a batch spray tool
Date on which the winner was chosen : 29/07/2025
Date of the conclusion of the contract : 27/08/2025
Organisation signing the contract : Danmarks Tekniske Universitet - DTU

6.1.4 Statistical information

Received tenders or requests to participate :
Type of received submissions : Tenders submitted electronically
Number of tenders or requests to participate received : 3
Type of received submissions : Tenders from micro, small or medium tenderers
Number of tenders or requests to participate received : 3
Type of received submissions : Tenders from tenderers registered in other European Economic Area countries than the country of the buyer
Number of tenders or requests to participate received : 3

8. Organisations

8.1 ORG-0001

Official name : Danmarks Tekniske Universitet - DTU
Registration number : 30060946
Postal address : Anker Engelunds Vej 1
Town : Kgs. Lyngby
Postcode : 2800
Country subdivision (NUTS) : Københavns omegn ( DK012 )
Country : Denmark
Contact point : Mia Iversen
Telephone : +45 61262786
Internet address : https://www.dtu.dk
Roles of this organisation :
Buyer
Organisation signing the contract
Organisation whose budget is used to pay for the contract
Organisation executing the payment

8.1 ORG-0002

Official name : Klagenævnet for Udbud
Registration number : 37795526
Postal address : Nævnenes hus, Toldboden 2
Town : Viborg
Postcode : 8800
Country subdivision (NUTS) : Østjylland ( DK042 )
Country : Denmark
Telephone : +45 35291000
Internet address : http://www.klfu.dk
Roles of this organisation :
Review organisation

8.1 ORG-0003

Official name : Konkurrence- og Forbrugerstyrelsen
Registration number : 10294819
Postal address : Carl Jacobsens Vej 35
Town : Valby
Postcode : 2500
Country subdivision (NUTS) : Byen København ( DK011 )
Country : Denmark
Telephone : +45 41715000
Internet address : http://www.kfst.dk
Roles of this organisation :
Organisation providing more information on the review procedures

8.1 ORG-0004

Official name : Siconnex Customized Solutions GmbH
Size of the economic operator : Medium
Registration number : ATU54968904
Postal address : Gewerbestrasse 2
Town : Hof bei Salzburg
Postcode : 5322
Country subdivision (NUTS) : Salzburg und Umgebung ( AT323 )
Country : Austria
Telephone : +43 6229 366460
Roles of this organisation :
Tenderer
Winner of these lots : LOT-0000

8.1 ORG-0005

Official name : Mercell Holding ASA
Registration number : 980921565
Postal address : Askekroken 11
Town : Oslo
Postcode : 0277
Country subdivision (NUTS) : Oslo ( NO081 )
Country : Norway
Contact point : eSender
Telephone : +47 21018800
Fax : +47 21018801
Internet address : http://mercell.com/
Roles of this organisation :
TED eSender

Notice information

Notice identifier/version : 2f1ee826-b996-4c46-a56a-a6b0cd3f5db0 - 01
Form type : Result
Notice type : Contract or concession award notice – standard regime
Notice dispatch date : 28/08/2025 09:07 +00:00
Notice dispatch date (eSender) : 28/08/2025 09:08 +00:00
Languages in which this notice is officially available : English
Notice publication number : 00566153-2025
OJ S issue number : 165/2025
Publication date : 29/08/2025