Silicon deep reactive ion etcher (Si DRIE)

DTU Nanolab requires a silicon deep reactive ion etcher (Si DRIE) to become its new primary instrument for 150 mm wafer processing. Delivery is expected no later than Q4 2026. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- …

CPV: 38000000 Laboratory, optical and precision equipments (excl. glasses), 51430000 Installation services of laboratory equipment
Place of execution:
Silicon deep reactive ion etcher (Si DRIE)
Awarding body:
Danmarks Tekniske Universitet - DTU
Award number:
9407

1. Buyer

1.1 Buyer

Official name : Danmarks Tekniske Universitet - DTU
Legal type of the buyer : Body governed by public law
Activity of the contracting authority : Education

2. Procedure

2.1 Procedure

Title : Silicon deep reactive ion etcher (Si DRIE)
Description : DTU Nanolab requires a silicon deep reactive ion etcher (Si DRIE) to become its new primary instrument for 150 mm wafer processing. Delivery is expected no later than Q4 2026. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients.
Procedure identifier : 050f32be-c45a-4dcc-b4e1-b455cc993aee
Previous notice : 7dfd976f-30ab-4e2c-b6ff-fe07f48ae61a-01
Internal identifier : 9407
Type of procedure : Open
The procedure is accelerated : no
Main features of the procedure : Open Procedure

2.1.1 Purpose

Main nature of the contract : Supplies
Additional nature of the contract : Services
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)
Additional classification ( cpv ): 51430000 Installation services of laboratory equipment

2.1.2 Place of performance

Postal address : Ørsteds Plads, Bygning 347
Town : Lyngby
Postcode : 2800
Country subdivision (NUTS) : Københavns omegn ( DK012 )
Country : Denmark

2.1.4 General information

Call for competition is terminated
Additional information : The Tenderer can only participate in the tender, if the Tenderer is not encompassed by the compulsory grounds for exclusion, cf. section 135-136 in the Danish Public Procurement Act and the voluntary grounds for exclusion in section 137(1)(1 and 2). Pursuant to section 134a in the Danish Public Procurement Act, DTU must exclude a Tenderer from participation in the procurement procedure if the Tenderer is established in a country that is included in the EU list of non-cooperative tax jurisdictions and has not acceded to the WTO Government Procurement Agreement or other trade agreements that oblige Denmark to open the market for public contracts to tenderers established in the country in question. Throughout the term of the Agreement, the Supplier must not be covered by the description in Article 5k of COUNCIL REGULATION (EU) 2022/576 of 8 April 2022 amending Regulation (EU) No 833/2014 concerning restrictive measures in view of Russia's actions destabilising the situation in Ukraine (‘Regulation 2022/576’). Upon DTU’s request the Tenderers must document that they are not encompassed by any of the grounds for exclusion stated in the ESPD. If the Tenderer is a consortium, all legal participants in the consortium must document that the consortium is not encompassed by any of the grounds for exclusion. If the Tenderer represents a consortium with several legally authorised persons, the Tenderer must complete and submit Appendix A – Consortium Declaration. If the Tender rely on the capacities of other entities, each supportive enterprise must document that they are not encompassed by any of the grounds for exclusion. If the Tenderer relies on the capacities of other entities, each entity must complete and submit Appendix B – Letter of Support. For Danish Tenderers the documentation requirement can be fulfilled by presenting an Official Certificate (Serviceattest) from the Danish Business Authority (Erhvervsstyrelsen), which must be issued no later than 12 months prior to the date where it is presented to DTU. Non-Danish Tenderers must provide: - An extract from a relevant register or a similar document issued by a competent authority, showing that the Tenderer is not encompassed by any of the grounds for exclusion, cf. (the Public Procurement Act) Udbudsloven § 135, sub-section1 (participation in a criminal organization, corruption, bribery, fraud, terrorist or criminal offences linked to terrorist activities, money laundering or terrorist financing and child labour and other forms of human trafficking) and, - A certificate issued by a competent authority showing that the Tenderer is not encompassed by any of the grounds for exclusion, cf. (the Public Procurement Act) Udbudslovens § 135, subsection 3 (payment of taxes and payment of social security) and § 137, sub-section 1, no. 2 (bankruptcy, insolvency, voluntary arrangement with creditors, analogous situation like bankruptcy under national law, assets being administered by liquidator and business activities are suspended). If requested by DTU, the Tenderers must document – as stated in the ESPD - that they fulfil minimum levels for suitability. As documentation for the winning tenderer's documentation for fulfilling minimum requirement for Technical and Professional Ability DTU reserves the right to contact the reference(s) stated in the ESPD. The Tenderers are requested to provide supporting documentation verifying the information submitted in the ESPD to be included with the Tender.
Legal basis :
Directive 2014/24/EU

5. Lot

5.1 Lot technical ID : LOT-0000

Title : Silicon deep reactive ion etcher (Si DRIE)
Description : DTU Nanolab requires a silicon deep reactive ion etcher (Si DRIE) to become its new primary instrument for 150 mm wafer processing. Delivery is expected no later than Q4 2026. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients.
Internal identifier : 9407

5.1.1 Purpose

Main nature of the contract : Supplies
Additional nature of the contract : Services
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)
Additional classification ( cpv ): 51430000 Installation services of laboratory equipment

5.1.2 Place of performance

Postal address : Ørsteds Plads, Bygning 347
Town : Lyngby
Postcode : 2800
Country subdivision (NUTS) : Københavns omegn ( DK012 )
Country : Denmark
Additional information :

5.1.3 Estimated duration

Other duration : Unknown

5.1.6 General information

Procurement Project not financed with EU Funds.
The procurement is covered by the Government Procurement Agreement (GPA) : yes
Additional information : The Tenderer can only participate in the tender, if the Tenderer is not encompassed by the compulsory grounds for exclusion, cf. section 135-136 in the Danish Public Procurement Act and the voluntary grounds for exclusion in section 137(1)(1 and 2). Pursuant to section 134a in the Danish Public Procurement Act, DTU must exclude a Tenderer from participation in the procurement procedure if the Tenderer is established in a country that is included in the EU list of non-cooperative tax jurisdictions and has not acceded to the WTO Government Procurement Agreement or other trade agreements that oblige Denmark to open the market for public contracts to tenderers established in the country in question. Throughout the term of the Agreement, the Supplier must not be covered by the description in Article 5k of COUNCIL REGULATION (EU) 2022/576 of 8 April 2022 amending Regulation (EU) No 833/2014 concerning restrictive measures in view of Russia's actions destabilising the situation in Ukraine (‘Regulation 2022/576’). Upon DTU’s request the Tenderers must document that they are not encompassed by any of the grounds for exclusion stated in the ESPD. If the Tenderer is a consortium, all legal participants in the consortium must document that the consortium is not encompassed by any of the grounds for exclusion. If the Tenderer represents a consortium with several legally authorised persons, the Tenderer must complete and submit Appendix A – Consortium Declaration. If the Tender rely on the capacities of other entities, each supportive enterprise must document that they are not encompassed by any of the grounds for exclusion. If the Tenderer relies on the capacities of other entities, each entity must complete and submit Appendix B – Letter of Support. For Danish Tenderers the documentation requirement can be fulfilled by presenting an Official Certificate (Serviceattest) from the Danish Business Authority (Erhvervsstyrelsen), which must be issued no later than 12 months prior to the date where it is presented to DTU. Non-Danish Tenderers must provide: - An extract from a relevant register or a similar document issued by a competent authority, showing that the Tenderer is not encompassed by any of the grounds for exclusion, cf. (the Public Procurement Act) Udbudsloven § 135, sub-section1 (participation in a criminal organization, corruption, bribery, fraud, terrorist or criminal offences linked to terrorist activities, money laundering or terrorist financing and child labour and other forms of human trafficking) and, - A certificate issued by a competent authority showing that the Tenderer is not encompassed by any of the grounds for exclusion, cf. (the Public Procurement Act) Udbudslovens § 135, subsection 3 (payment of taxes and payment of social security) and § 137, sub-section 1, no. 2 (bankruptcy, insolvency, voluntary arrangement with creditors, analogous situation like bankruptcy under national law, assets being administered by liquidator and business activities are suspended). If requested by DTU, the Tenderers must document – as stated in the ESPD - that they fulfil minimum levels for suitability. As documentation for the winning tenderer's documentation for fulfilling minimum requirement for Technical and Professional Ability DTU reserves the right to contact the reference(s) stated in the ESPD. The Tenderers are requested to provide supporting documentation verifying the information submitted in the ESPD to be included with the Tender.

5.1.7 Strategic procurement

5.1.10 Award criteria

Criterion :
Type : Price
Name : Price
Description : The price to be evaluated is the total price for the machine as well as the options, but not voluntary option, specified in Appendix 2 – Prices. DTU uses a linear point scale model to evaluate the tender prices. The linear model implies that the prices offered are converted into points.
Category of award threshold criterion : Weight (percentage, exact)
Award criterion number : 20
Criterion :
Type : Quality
Name : Functionality and Performance
Description : The sub-criteria “Functionality and performance” is based on the Tenderer’s specifications in Appendix 1 – Requirement Specification.
Category of award threshold criterion : Weight (percentage, exact)
Award criterion number : 40
Criterion :
Type : Quality
Name : Quality of submitted samples
Description : Evaluation of the sub-criteria “Quality of submitted samples” will be made based on an evaluation of the received samples.
Category of award threshold criterion : Weight (percentage, exact)
Award criterion number : 40

5.1.15 Techniques

Framework agreement :
No framework agreement
Information about the dynamic purchasing system :
No dynamic purchase system

5.1.16 Further information, mediation and review

Mediation organisation : Klagenævnet for Udbud
Review organisation : Klagenævnet for Udbud
Information about review deadlines : Complaint regarding the award of a contract must be submitted no later than 45 calendar days from the date after the Contracting Authority has published a notice in the European Union Official Journal informing that the Contracting Authority has awarded/concluded a contract, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 2, no. 1.
Organisation providing more information on the review procedures : Konkurrence- og Forbrugerstyrelsen

6. Results

6.1 Result lot ldentifier : LOT-0000

No winner was chosen and the competition is closed.
The reason why a winner was not chosen : Decision of the buyer, because of a change in needs

6.1.4 Statistical information

Summary of the review requests the buyer received :
Number of complainants : 0
Received tenders or requests to participate :
Type of received submissions : Tenders
Number of tenders or requests to participate received : 0

8. Organisations

8.1 ORG-0001

Official name : Danmarks Tekniske Universitet - DTU
Registration number : 30060946
Postal address : Anker Engelunds Vej 1
Town : Kgs. Lyngby
Postcode : 2800
Country subdivision (NUTS) : Københavns omegn ( DK012 )
Country : Denmark
Contact point : Anna Storch
Telephone : +45 25230071
Internet address : https://www.dtu.dk
Roles of this organisation :
Buyer

8.1 ORG-0002

Official name : Klagenævnet for Udbud
Registration number : 37795526
Postal address : Nævnenes hus, Toldboden 2
Town : Viborg
Postcode : 8800
Country subdivision (NUTS) : Vestjylland ( DK041 )
Country : Denmark
Telephone : +45 72405600
Internet address : http://www.klfu.dk
Roles of this organisation :
Review organisation
Mediation organisation

8.1 ORG-0003

Official name : Konkurrence- og Forbrugerstyrelsen
Registration number : 10294819
Postal address : Carl Jacobsens Vej 35
Town : Valby
Postcode : 2500
Country subdivision (NUTS) : Byen København ( DK011 )
Country : Denmark
Telephone : +45 41715000
Internet address : http://www.kfst.dk
Roles of this organisation :
Organisation providing more information on the review procedures

8.1 ORG-0004

Official name : Mercell Holding ASA
Registration number : 980921565
Postal address : Askekroken 11
Town : Oslo
Postcode : 0277
Country subdivision (NUTS) : Oslo ( NO081 )
Country : Norway
Contact point : eSender
Telephone : +47 21018800
Fax : +47 21018801
Internet address : http://mercell.com/
Roles of this organisation :
TED eSender

Notice information

Notice identifier/version : 7477941f-6dcc-4bee-9a60-cd9d11dc3f1b - 01
Form type : Result
Notice type : Contract or concession award notice – standard regime
Notice dispatch date : 18/08/2025 12:50 +00:00
Notice dispatch date (eSender) : 18/08/2025 12:50 +00:00
Languages in which this notice is officially available : English
Notice publication number : 00542204-2025
OJ S issue number : 158/2025
Publication date : 20/08/2025