Request for market information: Mercury CV prober for semiconductor wafer analysis

The object of the request for information is a Mercury CV prober for semiconductor wafer analysis. The system needs to contain a Mercury CV probe, accessory and safety equipment. Required specifications are described in more detail below. Specifications: Mercury CV prober o Manual wafer loading o Wafer size: 20x20 mm …

CPV: 38300000 Measuring instruments
Place of execution:
Request for market information: Mercury CV prober for semiconductor wafer analysis
Awarding body:
VTT Technical Research Centre of Finland Ltd
Award number:
28/206/2025

1. Buyer

1.1 Buyer

Official name : VTT Technical Research Centre of Finland Ltd
Legal type of the buyer : Public undertaking
Activity of the contracting authority : Economic affairs

2. Procedure

2.1 Procedure

Title : Request for market information: Mercury CV prober for semiconductor wafer analysis
Description : The object of the request for information is a Mercury CV prober for semiconductor wafer analysis. The system needs to contain a Mercury CV probe, accessory and safety equipment. Required specifications are described in more detail below. Specifications: Mercury CV prober o Manual wafer loading o Wafer size: 20x20 mm coupons to 300 mm wafers o Mapping of up to 300 mm wafers o C-V and I-V measurements using top and bottom side return contacts o Mercury contact spot size: max 1 mm o DC BIAS: up to +-3kV o AC frequency range: 50 Hz - 1 MHz o Full computer control of measurements, wafer mapping, data analysis and storage. Facility requirements: o Designed for cleanroom use: Will be installed in a ISO4 or ISO6 cleanroom o Cabinet extract with mercury vapor filtering inside the tool cabinet o Mercury vapor concentration measurement inside the tool cabinet o Cleanroom floor space requirement: max 2x2m (excluding service area) Schedule: o The delivery must take place in 2025
Internal identifier : 28/206/2025

2.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 38300000 Measuring instruments

2.1.2 Place of performance

Postal address : Tietotie 3
Town : Espoo
Postcode : 02150
Country subdivision (NUTS) : Helsinki-Uusimaa ( FI1B1 )
Country : Finland

2.1.4 General information

Legal basis :
Directive 2014/24/EU

3. Part

3.1 Part technical ID : PAR-0000

Title : Request for market information: Mercury CV prober for semiconductor wafer analysis
Description : The object of the request for information is a Mercury CV prober for semiconductor wafer analysis. The system needs to contain a Mercury CV probe, accessory and safety equipment. Required specifications are described in more detail below. Specifications: Mercury CV prober o Manual wafer loading o Wafer size: 20x20 mm coupons to 300 mm wafers o Mapping of up to 300 mm wafers o C-V and I-V measurements using top and bottom side return contacts o Mercury contact spot size: max 1 mm o DC BIAS: up to +-3kV o AC frequency range: 50 Hz - 1 MHz o Full computer control of measurements, wafer mapping, data analysis and storage. Facility requirements: o Designed for cleanroom use: Will be installed in a ISO4 or ISO6 cleanroom o Cabinet extract with mercury vapor filtering inside the tool cabinet o Mercury vapor concentration measurement inside the tool cabinet o Cleanroom floor space requirement: max 2x2m (excluding service area) Schedule: o The delivery must take place in 2025
Internal identifier : 28/206/2025

3.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 38300000 Measuring instruments

3.1.2 Place of performance

Postal address : Tietotie 3
Town : Espoo
Postcode : 02150
Country subdivision (NUTS) : Helsinki-Uusimaa ( FI1B1 )
Country : Finland

3.1.5 General information

The procurement is covered by the Government Procurement Agreement (GPA) : yes

3.1.6 Procurement documents

Deadline for requesting additional information : 16/04/2025 05:00 +00:00

3.1.9 Further information, mediation and review

Review organisation : Markkinaoikeus -

8. Organisations

8.1 ORG-0001

Official name : VTT Technical Research Centre of Finland Ltd
Registration number : 2647375-4
Postal address : P.O. Box 1000, VTT
Town : VTT
Postcode : 02044
Country subdivision (NUTS) : Helsinki-Uusimaa ( FI1B1 )
Country : Finland
Contact point : VTT Technical Research Centre of Finland Ltd
Telephone : +358 20722111
Roles of this organisation :
Buyer

8.1 ORG-0002

Official name : Markkinaoikeus
Registration number : 3006157-6
Postal address : Radanrakentajantie 5
Town : Helsinki
Postcode : 00520
Country subdivision (NUTS) : Helsinki-Uusimaa ( FI1B1 )
Country : Finland
Telephone : +358 295643300
Roles of this organisation :
Review organisation

8.1 ORG-0003

Official name : Hansel Oy (Hilma)
Registration number : FI09880841
Postal address : Mannerheiminaukio 1a
Town : Helsinki
Postcode : 00100
Country subdivision (NUTS) : Helsinki-Uusimaa ( FI1B1 )
Country : Finland
Contact point : eSender
Telephone : 029 55 636 30
Roles of this organisation :
TED eSender
Notice information
Notice identifier/version : 1b97970d-c3fb-40dd-854e-726012f51fba - 01
Form type : Planning
Notice type : Prior information notice or a periodic indicative notice used only for information
Notice dispatch date : 27/03/2025 09:30 +00:00
Notice dispatch date (eSender) : 27/03/2025 09:32 +00:00
Languages in which this notice is officially available : English
Notice publication number : 00201315-2025
OJ S issue number : 62/2025
Publication date : 28/03/2025
Estimated date of publication of a contract notice within this procedure : 16/04/2025