III-V ICP Etcher

DTU requires a ICP reactive ion etcher to etch III-V materials with a special focus on etching GaAs micropillar devices from a planar microcavity (“the Instrument”). The system is expected to be delivered as soon as possible but at the latest in Q3 2026. The Instrument is to be the …

CPV: 38000000 Laboratory, optical and precision equipments (excl. glasses), 51430000 Installation services of laboratory equipment
Deadline:
Aug. 13, 2025, 9:55 p.m.
Deadline type:
Submitting a bid
Place of execution:
III-V ICP Etcher
Awarding body:
Danmarks Tekniske Universitet - DTU
Award number:
9924

1. Buyer

1.1 Buyer

Official name : Danmarks Tekniske Universitet - DTU
Legal type of the buyer : Body governed by public law
Activity of the contracting authority : Education

2. Procedure

2.1 Procedure

Title : III-V ICP Etcher
Description : DTU requires a ICP reactive ion etcher to etch III-V materials with a special focus on etching GaAs micropillar devices from a planar microcavity (“the Instrument”). The system is expected to be delivered as soon as possible but at the latest in Q3 2026. The Instrument is to be the core instrument for a research project on optical devices. Besides that, it will be part of the shared open access instruments at the facility supporting research in micro and nano fabrication within optical devices and quantum computer developments. Therefore, DTU need a state-of-the-art instrument that can meet all current and future needs for etching III-V materials like GaAs, AlGaAs, InGaAs, AlInGaAsP and InP .
Procedure identifier : 6027fd31-0077-4aee-8e35-7fe1fb5b1bd6
Internal identifier : 9924
Type of procedure : Open
The procedure is accelerated : no
Justification for the accelerated procedure :
Main features of the procedure :

2.1.1 Purpose

Main nature of the contract : Supplies
Additional nature of the contract : Services
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)
Additional classification ( cpv ): 51430000 Installation services of laboratory equipment

2.1.2 Place of performance

Postal address : Ørsteds Plads, Bygning 347
Town : Lyngby
Postcode : 2800
Country subdivision (NUTS) : Københavns omegn ( DK012 )
Country : Denmark

2.1.4 General information

Additional information : The Tenderer can only participate in the tender, if the Tenderer is not encompassed by the compulsory grounds for exclusion, cf. section 135-136 in the Danish Public Procurement Act and the voluntary grounds for exclusion in section 137(1)(1 and 2). Pursuant to section 134a in the Danish Public Procurement Act, DTU must exclude a Tenderer from participation in the procurement procedure if the Tenderer is established in a country that is included in the EU list of non-cooperative tax jurisdictions and has not acceded to the WTO Government Procurement Agreement or other trade agreements that oblige Denmark to open the market for public contracts to tenderers established in the country in question. Throughout the term of the Agreement, the Supplier must not be covered by the description in Article 5k of COUNCIL REGULATION (EU) 2022/576 of 8 April 2022 amending Regulation (EU) No 833/2014 concerning restrictive measures in view of Russia's actions destabilising the situation in Ukraine (‘Regulation 2022/576’). Upon DTU’s request the Tenderers must document that they are not encompassed by any of the grounds for exclusion stated in the ESPD. If the Tenderer is a consortium, all legal participants in the consortium must document that the consortium is not encompassed by any of the grounds for exclusion. If the Tenderer represents a consortium with several legally authorised persons, the Tenderer must complete and submit Appendix A – Consortium Declaration. If the Tender rely on the capacities of other entities, each supportive enterprise must document that they are not encompassed by any of the grounds for exclusion. If the Tenderer relies on the capacities of other entities, each entity must complete and submit Appendix B – Letter of Support. For Danish Tenderers the documentation requirement can be fulfilled by presenting an Official Certificate (Serviceattest) from the Danish Business Authority (Erhvervsstyrelsen), which must be issued no later than 12 months prior to the date where it is presented to DTU. Non-Danish Tenderers must provide: - An extract from a relevant register or a similar document issued by a competent authority, showing that the Tenderer is not encompassed by any of the grounds for exclusion, cf. (the Public Procurement Act) Udbudsloven § 135, sub-section1 (participation in a criminal organization, corruption, bribery, fraud, terrorist or criminal offences linked to terrorist activities, money laundering or terrorist financing and child labour and other forms of human trafficking) and, - A certificate issued by a competent authority showing that the Tenderer is not encompassed by any of the grounds for exclusion, cf. (the Public Procurement Act) Udbudslovens § 135, subsection 3 (payment of taxes and payment of social security) and § 137, sub-section 1, no. 2 (bankruptcy, insolvency, voluntary arrangement with creditors, analogous situation like bankruptcy under national law, assets being administered by liquidator and business activities are suspended). If requested by DTU, the Tenderers must document – as stated in the ESPD - that they fulfil minimum levels for suitability. As documentation for the winning tenderer's documentation for fulfilling minimum requirement for Technical and Professional Ability DTU reserves the right to contact the reference(s) stated in the ESPD Due to DTU Nanolab budgetary limits, a Price of more than 670,000 EUR will be deemed unconditional.
Legal basis :
Directive 2014/24/EU

2.1.6 Grounds for exclusion

Analogous situation like bankruptcy under national law : Is the economic operator in in any analogous situation like bankruptcy arising from a similar procedure under national laws and regulations? This information needs not be given if exclusion of economic operators in this case has been made mandatory under the applicable national law without any possibility of derogation where the economic operator is nevertheless able to perform the contract.
Bankruptcy : Is the economic operator bankrupt? This information needs not be given if exclusion of economic operators in this case has been made mandatory under the applicable national law without any possibility of derogation where the economic operator is nevertheless able to perform the contract.
Corruption : Has the economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein been the subject of a conviction by final judgment for corruption, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable? As defined in Article 3 of the Convention on the fight against corruption involving officials of the European Communities or officials of Member States of the European Union, OJ C 195, 25.6.1997, p. 1, and in Article 2(1) of Council Framework Decision 2003/568/JHA of 22 July 2003 on combating corruption in the private sector (OJ L 192, 31.7.2003, p. 54). This exclusion ground also includes corruption as defined in the national law of the contracting authority (contracting entity) or the economic operator
Arrangement with creditors : Is the economic operator in arrangement with creditors? This information needs not be given if exclusion of economic operators in this case has been made mandatory under the applicable national law without any possibility of derogation where the economic operator is nevertheless able to perform the contract.
Participation in a criminal organisation : Has the economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein been the subject of a conviction by final judgment for participation in a criminal organisation, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable? As defined in Article 2 of Council Framework Decision 2008/841/JHA of 24 October 2008 on the fight against organised crime (OJ L 300, 11.11.2008, p. 42).
Money laundering or terrorist financing : Has the economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein been the subject of a conviction by final judgment for money laundering or terrorist financing, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable? As defined in Article 1 of Directive 2005/60/EC of the European Parliament and of the Council of 26 October 2005 on the prevention of the use of the financial system for the purpose of money laundering and terrorist financing (OJ L 309, 25.11.2005, p. 15).
Fraud : Has the economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein been the subject of a conviction by final judgment for fraud, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable? Within the meaning of Article 1 of the Convention on the protection of the European Communities' financial interests (OJ C 316, 27.11.1995, p. 48).
Child labour and other forms of trafficking in human beings : Has the economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein been the subject of a conviction by final judgment for child labour and other forms of trafficking in human beings, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable? As defined in Article 2 of Directive 2011/36/EU of the European Parliament and of the Council of 5 April 2011 on preventing and combating trafficking in human beings and protecting its victims, and replacing Council Framework Decision 2002/629/JHA (OJ L 101, 15.4.2011, p. 1).
Insolvency : Is the economic operator the subject of insolvency or winding-up? This information needs not be given if exclusion of economic operators in this case has been made mandatory under the applicable national law without any possibility of derogation where the economic operator is nevertheless able to perform the contract.
Assets being administered by liquidator : Are the assets of the economic operator being administered by a liquidator or by the court? This information needs not be given if exclusion of economic operators in this case has been made mandatory under the applicable national law without any possibility of derogation where the economic operator is nevertheless able to perform the contract.
Guilty of misrepresentation, withheld information, unable to provide required documents and obtained confidential information of this procedure : Can the economic operator confirm that:a) It has been guilty of serious misrepresentation in supplying the information required for the verification of the absence of grounds for exclusion or the fulfilment of the selection criteria,b) It has withheld such information,c) It has not been able, without delay, to submit the supporting documents required by a contracting authority or contracting entity, andd) It has undertaken to unduly influence the decision making process of the contracting authority or contracting entity, to obtain confidential information that may confer upon it undue advantages in the procurement procedure or to negligently provide misleading information that may have a material influence on decisions concerning exclusion, selection or award?
Conflict of interest due to its participation in the procurement procedure : Is the economic operator aware of any conflict of interest, as indicated in national law, the relevant notice or the procurement documents due to its participation in the procurement procedure?
Direct or indirect involvement in the preparation of this procurement procedure : Has the economic operator or an undertaking related to it advised the contracting authority or contracting entity or otherwise been involved in the preparation of the procurement procedure?
Guilty of grave professional misconduct : Is the economic operator guilty of grave professional misconduct? Where applicable, see definitions in national law, the relevant notice or the procurement documents.
Payment of social security contributions : Has the economic operator breached its obligations relating to the payment social security contributions, both in the country in which it is established and in Member State of the contracting authority or contracting entity if other than the country of establishment?
Business activities are suspended : Are the business activities of the economic operator suspended? This information needs not be given if exclusion of economic operators in this case has been made mandatory under the applicable national law without any possibility of derogation where the economic operator is nevertheless able to perform the contract.
Payment of taxes : Has the economic operator breached its obligations relating to the payment of taxes, both in the country in which it is established and in Member State of the contracting authority or contracting entity if other than the country of establishment?
Terrorist offences or offences linked to terrorist activities : Has the economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein been the subject of a conviction by final judgment for terrorist offences or offences linked to terrorist activities, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable? As defined in Articles 1 and 3 of Council Framework Decision of 13 June 2002 on combating terrorism (OJ L 164, 22.6.2002, p. 3). This exclusion ground also includes inciting or aiding or abetting or attempting to commit an offence, as referred to in Article 4 of that Framework Decision.

5. Lot

5.1 Lot technical ID : LOT-0000

Title : III-V ICP Etcher
Description : DTU requires a ICP reactive ion etcher to etch III-V materials with a special focus on etching GaAs micropillar devices from a planar microcavity (“the Instrument”). The system is expected to be delivered as soon as possible but at the latest in Q3 2026. The Instrument is to be the core instrument for a research project on optical devices. Besides that, it will be part of the shared open access instruments at the facility supporting research in micro and nano fabrication within optical devices and quantum computer developments. Therefore, DTU need a state-of-the-art instrument that can meet all current and future needs for etching III-V materials like GaAs, AlGaAs, InGaAs, AlInGaAsP and InP .
Internal identifier : 9924

5.1.1 Purpose

Main nature of the contract : Supplies
Additional nature of the contract : Services
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)
Additional classification ( cpv ): 51430000 Installation services of laboratory equipment

5.1.2 Place of performance

Postal address : Ørsteds Plads, Bygning 347
Town : Lyngby
Postcode : 2800
Country subdivision (NUTS) : Københavns omegn ( DK012 )
Country : Denmark
Additional information :

5.1.3 Estimated duration

Other duration : Unknown

5.1.6 General information

Reserved participation : Participation is not reserved.
Procurement Project not financed with EU Funds.
The procurement is covered by the Government Procurement Agreement (GPA) : yes
Additional information : The Tenderer can only participate in the tender, if the Tenderer is not encompassed by the compulsory grounds for exclusion, cf. section 135-136 in the Danish Public Procurement Act and the voluntary grounds for exclusion in section 137(1)(1 and 2). Pursuant to section 134a in the Danish Public Procurement Act, DTU must exclude a Tenderer from participation in the procurement procedure if the Tenderer is established in a country that is included in the EU list of non-cooperative tax jurisdictions and has not acceded to the WTO Government Procurement Agreement or other trade agreements that oblige Denmark to open the market for public contracts to tenderers established in the country in question. Throughout the term of the Agreement, the Supplier must not be covered by the description in Article 5k of COUNCIL REGULATION (EU) 2022/576 of 8 April 2022 amending Regulation (EU) No 833/2014 concerning restrictive measures in view of Russia's actions destabilising the situation in Ukraine (‘Regulation 2022/576’). Upon DTU’s request the Tenderers must document that they are not encompassed by any of the grounds for exclusion stated in the ESPD. If the Tenderer is a consortium, all legal participants in the consortium must document that the consortium is not encompassed by any of the grounds for exclusion. If the Tenderer represents a consortium with several legally authorised persons, the Tenderer must complete and submit Appendix A – Consortium Declaration. If the Tender rely on the capacities of other entities, each supportive enterprise must document that they are not encompassed by any of the grounds for exclusion. If the Tenderer relies on the capacities of other entities, each entity must complete and submit Appendix B – Letter of Support. For Danish Tenderers the documentation requirement can be fulfilled by presenting an Official Certificate (Serviceattest) from the Danish Business Authority (Erhvervsstyrelsen), which must be issued no later than 12 months prior to the date where it is presented to DTU. Non-Danish Tenderers must provide: - An extract from a relevant register or a similar document issued by a competent authority, showing that the Tenderer is not encompassed by any of the grounds for exclusion, cf. (the Public Procurement Act) Udbudsloven § 135, sub-section1 (participation in a criminal organization, corruption, bribery, fraud, terrorist or criminal offences linked to terrorist activities, money laundering or terrorist financing and child labour and other forms of human trafficking) and, - A certificate issued by a competent authority showing that the Tenderer is not encompassed by any of the grounds for exclusion, cf. (the Public Procurement Act) Udbudslovens § 135, subsection 3 (payment of taxes and payment of social security) and § 137, sub-section 1, no. 2 (bankruptcy, insolvency, voluntary arrangement with creditors, analogous situation like bankruptcy under national law, assets being administered by liquidator and business activities are suspended). If requested by DTU, the Tenderers must document – as stated in the ESPD - that they fulfil minimum levels for suitability. As documentation for the winning tenderer's documentation for fulfilling minimum requirement for Technical and Professional Ability DTU reserves the right to contact the reference(s) stated in the ESPD Due to DTU Nanolab budgetary limits, a Price of more than 670,000 EUR will be deemed unconditional.

5.1.9 Selection criteria

Criterion :
Type : Economic and financial standing
Use of this criterion : Not used
Criterion :
Type : Suitability to pursue the professional activity
Use of this criterion : Not used
Criterion :
Type : Technical and professional ability
Name : For supply contracts: performance of deliveries of the specified type
Description : The Tenderer must demonstrate this by providing at least 3 relevant references for comparable agreements, showing that the Tenderer has previously delivered, installed and serviced a III-V ICP Reactive Ion Etching machine substantially equivalent to the Instrument. Comparable agreements mean agreements with a comparable value of between 400,000 and 1,000,000 EUR, covering the same services as the Instrument in this Tender or comparable deliveries and services. The agreement, to which the reference refers, must not be more than 5 years old. The date is calculated from the last delivery date of the machine under the agreement in the reference.
Use of this criterion : Used

5.1.10 Award criteria

Criterion :
Type : Price
Name : Price
Description : The price to be evaluated is the total price for the machines as well as the options, but not voluntary option, specified in Appendix 2 – Prices.
Category of award threshold criterion : Weight (percentage, exact)
Award criterion number : 20
Criterion :
Type : Quality
Name : Hardware, functionality and services
Description : DTU Nanolab will assess if the tender fulfils the specified evaluation requirements to sub-criterion “Quality of submitted samples”, and sub-criteria “Functionality and performance” is based on the Tenderer’s specifications in Appendix 1 – Requirement Specification.
Category of award threshold criterion : Weight (percentage, exact)
Award criterion number : 40
Criterion :
Type : Quality
Name : Quality of submitted samples and performance evaluation
Description : The performance evaluation is based on the returned samples: The provided samples shall show evidence of the Tenderers tool's capability of covering the processing requirements based on the process descriptions in the Appendix 3. DTU Nanolab will assess whether the submitted samples fulfil the specified evaluation requirements as defined in Appendix 3. Based on the assessment of fulfilments, points are awarded on the above-mentioned scale of 0-10. If the Tenderer has already submitted such demo samples, the Tenderer can refer to such submitted Demo samples instead of providing new samples.
Category of award threshold criterion : Weight (percentage, exact)
Award criterion number : 40
Description of the method to be used if weighting cannot be expressed by criteria :
Justification for not indicating the weighting of the award criteria :

5.1.11 Procurement documents

Languages in which the procurement documents are officially available : English

5.1.12 Terms of procurement

Terms of submission :
Electronic submission : Required
Languages in which tenders or requests to participate may be submitted : English
Electronic catalogue : Allowed
Variants : Not allowed
Tenderers may submit more than one tender : Not allowed
Description of the financial guarantee : All up front payments must be backed by a bank guarantee.
Deadline for receipt of tenders : 13/08/2025 21:55 +00:00
Deadline until which the tender must remain valid : 6 Month
Information about public opening :
Opening date : 13/08/2025 21:55 +00:00
Terms of contract :
The execution of the contract must be performed within the framework of sheltered employment programmes : No
Electronic invoicing : Required
Electronic ordering will be used : no
Electronic payment will be used : yes

5.1.15 Techniques

Framework agreement :
No framework agreement
Information about the dynamic purchasing system :
No dynamic purchase system

5.1.16 Further information, mediation and review

Mediation organisation : Klagenævnet for Udbud -
Review organisation : Klagenævnet for Udbud -
Information about review deadlines : Complaint regarding the award of a contract must be submitted no later than 45 calendar days from the date after the Contracting Authority has published a notice in the European Union Official Journal informing that the Contracting Authority has awarded/concluded a contract, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 2, no. 1.
Organisation providing more information on the review procedures : Konkurrence- og Forbrugerstyrelsen -
Organisation receiving requests to participate : Danmarks Tekniske Universitet - DTU -
Organisation processing tenders : Danmarks Tekniske Universitet - DTU -

8. Organisations

8.1 ORG-0001

Official name : Danmarks Tekniske Universitet - DTU
Registration number : 30060946
Postal address : Anker Engelunds Vej 1
Town : Kgs. Lyngby
Postcode : 2800
Country subdivision (NUTS) : Københavns omegn ( DK012 )
Country : Denmark
Contact point : Anna Storch
Telephone : +45 25230071
Internet address : https://www.dtu.dk
Roles of this organisation :
Buyer
Organisation receiving requests to participate
Organisation processing tenders

8.1 ORG-0002

Official name : Klagenævnet for Udbud
Registration number : 37795526
Postal address : Nævnenes hus, Toldboden 2
Town : Viborg
Postcode : 8800
Country subdivision (NUTS) : Østjylland ( DK042 )
Country : Denmark
Telephone : +45 72405600
Internet address : https://www.klfu.dk
Roles of this organisation :
Review organisation
Mediation organisation

8.1 ORG-0003

Official name : Konkurrence- og Forbrugerstyrelsen
Registration number : 10294819
Postal address : Carl Jacobsens Vej 35
Town : Valby
Postcode : 2500
Country subdivision (NUTS) : Byen København ( DK011 )
Country : Denmark
Telephone : +45 41715000
Internet address : http://www.kfst.dk
Roles of this organisation :
Organisation providing more information on the review procedures

8.1 ORG-0004

Official name : Mercell Holding ASA
Registration number : 980921565
Postal address : Askekroken 11
Town : Oslo
Postcode : 0277
Country subdivision (NUTS) : Oslo ( NO081 )
Country : Norway
Contact point : eSender
Telephone : +47 21018800
Fax : +47 21018801
Internet address : http://mercell.com/
Roles of this organisation :
TED eSender
Notice information
Notice identifier/version : 129b0fa9-ea50-48ac-a63e-bfeafd08736d - 01
Form type : Competition
Notice type : Contract or concession notice – standard regime
Notice dispatch date : 23/06/2025 11:10 +00:00
Notice dispatch date (eSender) : 23/06/2025 11:13 +00:00
Languages in which this notice is officially available : English
Notice publication number : 00410886-2025
OJ S issue number : 119/2025
Publication date : 25/06/2025