Electron beam lithography (EBL) and laser beam lithography (LBL) systems

University of Jyväskylä (JYU) is inviting tenders for a combination of an electron beam lithography system (EBL) and a laser beam lithography system (LBL), both capable of mix-and-match processing based on CAD drawings in GDSII file format. We are searching a Dedicated EBL tool AND a Dedicated LBL tool for …

CPV: 38000000 Laboratory, optical and precision equipments (excl. glasses)
Place of execution:
Electron beam lithography (EBL) and laser beam lithography (LBL) systems
Awarding body:
University of Jyväskylä
Award number:
49/02.03.00.00/2025

1. Buyer

1.1 Buyer

Official name : University of Jyväskylä
Legal type of the buyer : Body governed by public law
Activity of the contracting authority : Education

2. Procedure

2.1 Procedure

Title : Electron beam lithography (EBL) and laser beam lithography (LBL) systems
Description : University of Jyväskylä (JYU) is inviting tenders for a combination of an electron beam lithography system (EBL) and a laser beam lithography system (LBL), both capable of mix-and-match processing based on CAD drawings in GDSII file format. We are searching a Dedicated EBL tool AND a Dedicated LBL tool for research and development of state of the art micro- and nano-scale features requiring high fidelity in patterning and edge smoothness. Contracting authority has a need for high precision and versatile lithography tools for patterning of optical wave guides and lattices, phononic crystals and mechanic resonators; with the goal of investigating quantum phenomena and the interplay between such structures. Contracting authority has a need for the lithography tools to support integration of high fidelity nano-scale features into considerably larger designs, such as microfluidic networks with widths of about 100 um and lengths of several mm. Therefore, contracting authority puts emphasis on the two lithography systems having good support for mix-and-match lithography, i.e. well documented procedures for sharing CAD pattern libraries for straightforward implementation in mix-and-match exposures on the same resist layer. The EBL and LBL systems should manage mix-and-match exposures with resists such as Shipley S1813, SU-8 and AZ5200-E series.
Procedure identifier : 5bae275b-d324-4d3f-9874-9ab60e898809
Previous notice : a0d4c2fb-1d0f-48cd-bc38-4d798b381b2c-01
Internal identifier : 49/02.03.00.00/2025
Type of procedure : Open
The procedure is accelerated : no
Justification for the accelerated procedure :
Main features of the procedure : In an open procedure the contracting entity publishes a contract notice and places a call for tenders for the receivable, on which basis all prospective suppliers may submit their tenders. After the contract notice has been published and the call for tenders has been placed, the contracting entity may send the call for tenders to the suppliers that it considers suitable. A contracting entity may conclude a procurement agreement in the form of separate lots and may determine the size and subject-matter of such lots. Tenders must be submitted for both of the lots (EBL and LBL),

2.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)

2.1.2 Place of performance

Country subdivision (NUTS) : Keski-Suomi ( FI193 )
Country : Finland

2.1.4 General information

Legal basis :
Directive 2014/24/EU

5. Lot

5.1 Lot technical ID : LOT-0001

Title : EBL system
Description : A Dedicated EBL tool for fabrication of state of the art nano-scale structures. Contracting authority has a need for high precision and versatile tool which would be extremely useful in preparation of phononic and photonic structures, such as waveguides, gratings and meta-plasmonic structures. The EBL system should have good support for mix-and-match lithography, i.e. well documented procedures for sharing CAD pattern libraries for straightforward implementation in mix-and-match exposures with the LBL system in lot 2.
Internal identifier : 1

5.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)

5.1.2 Place of performance

Country subdivision (NUTS) : Keski-Suomi ( FI193 )
Country : Finland
Additional information : Jyväskylä

5.1.6 General information

Procurement Project not financed with EU Funds.
The procurement is covered by the Government Procurement Agreement (GPA) : yes

5.1.7 Strategic procurement

Social objective promoted : Human rights due diligence in global supply chains, Fair working conditions

5.1.10 Award criteria

Criterion :
Type : Price
Name : Hinta
Description : Vertailuhinta
Category of award weight criterion : Fixed value (total)
Award criterion number : 80
Criterion :
Type : Quality
Name : Laatu
Description : Laatupisteytys
Category of award weight criterion : Fixed value (total)
Award criterion number : 20
Description of the method to be used if weighting cannot be expressed by criteria :
Justification for not indicating the weighting of the award criteria :

5.1.15 Techniques

Framework agreement :
No framework agreement
Information about the dynamic purchasing system :
No dynamic purchase system

5.1.16 Further information, mediation and review

Review organisation : Markkinaoikeus -

5.1 Lot technical ID : LOT-0002

Title : LBL system
Description : A laser beam lithography system (LBL) for advanced microfabrication of semiconductor and biomedical devices. The system will be installed in a clean-room facility of class iso 5, forming part of a larger lithography research line. The system must meet high performance specifications for resolution. The system is intended for exposure of photoresists where suitable exposure wavelength is 375 nm. The majority of processing will occur on chips sized from 5 mm by 5 mm up to standard 4 inch diameter wafers, however we require that up to 5 x 5 inch substrates can fit into the system. The LBL system should have good support for mix-and-match lithography, i.e. well documented procedures for sharing CAD pattern libraries for straightforward implementation in mix-and-match exposures with the EBL system in lot 1. The system needs to be installed by the supplier.
Internal identifier : 2.

5.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)

5.1.2 Place of performance

Country subdivision (NUTS) : Keski-Suomi ( FI193 )
Country : Finland
Additional information :

5.1.6 General information

Procurement Project not financed with EU Funds.
The procurement is covered by the Government Procurement Agreement (GPA) : yes

5.1.7 Strategic procurement

Social objective promoted : Human rights due diligence in global supply chains, Fair working conditions

5.1.10 Award criteria

Criterion :
Type : Price
Name : Vertailuhinta
Description : Hintavertailu
Category of award weight criterion : Fixed value (total)
Award criterion number : 80
Criterion :
Type : Quality
Name : Laatuvertailu
Description : Laatupisteytys
Category of award weight criterion : Fixed value (total)
Award criterion number : 20
Description of the method to be used if weighting cannot be expressed by criteria :
Justification for not indicating the weighting of the award criteria :

5.1.15 Techniques

Framework agreement :
No framework agreement
Information about the dynamic purchasing system :
No dynamic purchase system

5.1.16 Further information, mediation and review

Review organisation : Markkinaoikeus -

6. Results

Value of all contracts awarded in this notice : 1 265 000 Euro

6.1 Result lot ldentifier : LOT-0001

At least one winner was chosen.

6.1.2 Information about winners

Winner :
Official name : Raith GmbH
Tender :
Tender identifier : tenderReference-4243800-831424
Identifier of lot or group of lots : LOT-0001
Subcontracting : No
Contract information :
Identifier of the contract : 49/02.03.00.00/2025
Date of the conclusion of the contract : 12/06/2025

6.1.4 Statistical information

Received tenders or requests to participate :
Type of received submissions : Tenders
Number of tenders or requests to participate received : 1

6.1 Result lot ldentifier : LOT-0002

At least one winner was chosen.

6.1.2 Information about winners

Winner :
Official name : Raith GmbH
Tender :
Tender identifier : tenderReference-4243800-831425
Identifier of lot or group of lots : LOT-0002
Subcontracting : No
Contract information :
Identifier of the contract : 49/02.03.00.00/2025_2
Date of the conclusion of the contract : 12/06/2025

6.1.4 Statistical information

Received tenders or requests to participate :
Type of received submissions : Tenders
Number of tenders or requests to participate received : 1

8. Organisations

8.1 ORG-0001

Official name : Markkinaoikeus
Registration number : 3006157-6
Postal address : Radanrakentajantie 5
Town : Helsinki
Postcode : 00520
Country subdivision (NUTS) : Helsinki-Uusimaa ( FI1B1 )
Country : Finland
Telephone : +358 295643300
Roles of this organisation :
Review organisation

8.1 ORG-0002

Official name : University of Jyväskylä
Registration number : 0245894-7
Postal address : Seminaarinkatu 15
Town : Jyväskylän yliopisto
Postcode : 40014
Country subdivision (NUTS) : Keski-Suomi ( FI193 )
Country : Finland
Contact point : Hankintapalvelut
Telephone : +358 0142601211
Internet address : http://www.jyu.fi
Roles of this organisation :
Buyer

8.1 ORG-0003

Official name : Raith GmbH
Registration number : DE124727617
Postal address : Konrad-Adenauer-Allee 8
Town : Dortmund
Postcode : 44263
Country subdivision (NUTS) : Dortmund, Kreisfreie Stadt ( DEA52 )
Country : Germany
Telephone : +49 231 950040
Roles of this organisation :
Tenderer
Winner of these lots : LOT-0001 LOT-0002

8.1 ORG-0004

Official name : Hansel Oy (Hilma)
Registration number : FI09880841
Postal address : Mannerheiminaukio 1a
Town : Helsinki
Postcode : 00100
Country subdivision (NUTS) : Helsinki-Uusimaa ( FI1B1 )
Country : Finland
Contact point : eSender
Telephone : 029 55 636 30
Roles of this organisation :
TED eSender

11. Notice information

11.1 Notice information

Notice identifier/version : 57c7f451-972d-46e0-9061-82861d39618b - 01
Form type : Result
Notice type : Contract or concession award notice – standard regime
Notice dispatch date : 16/06/2025 05:33 +00:00
Notice dispatch date (eSender) : 16/06/2025 05:35 +00:00
Languages in which this notice is officially available : English

11.2 Publication information

Notice publication number : 00391306-2025
OJ S issue number : 114/2025
Publication date : 17/06/2025