Imaging Spectroscopic Nulling Ellipsometer

DTU intends to order an imaging spectroscopic nulling ellipsometer for anisotropic refractive index measurements on materials with sample sizes down to few micrometers. The equipment should have the ability to: • Measure the uniaxial anisotropic complex refractive index of samples with thickness of around 100 nm, and determine both the …

CPV: 38000000 Лабораторно, оптично и прецизно оборудване (без стъклени изделия)
Място на изпълнение:
Imaging Spectroscopic Nulling Ellipsometer
Издаващ орган:
Danmarks Tekniske Universitet - DTU
Номер на наградата:
10254

1. Buyer

1.1 Buyer

Official name : Danmarks Tekniske Universitet - DTU
Legal type of the buyer : Body governed by public law
Activity of the contracting authority : Education

2. Procedure

2.1 Procedure

Title : Imaging Spectroscopic Nulling Ellipsometer
Description : DTU intends to order an imaging spectroscopic nulling ellipsometer for anisotropic refractive index measurements on materials with sample sizes down to few micrometers. The equipment should have the ability to: • Measure the uniaxial anisotropic complex refractive index of samples with thickness of around 100 nm, and determine both the refractive index and thickness with high accuracy • Provide spatial resolution down to 1 micrometer (at a wavelength of 400 nm) for measuring few-micron-sized samples, such as exfoliated 2D materials. • Provide variable angle imaging spectroscopic ellipsometry (from 38° to 90°, where 90° means transmis-sion mode). • Measure over a spectral range covering 190 nm – 1000 nm (UV-Vis), with the capability of being upgraded to extend into the near infrared (up to 1700 nm). • Measure samples on transparent substrates • Automate measurements over cm-scale areas (such as standard 4-inch wafers) • Be upgraded to Mueller Matrix measurements (for measuring biaxial samples). • Provide software for ellipsometric modelling.
Procedure identifier : 9e999862-95f3-4e36-a57e-a167ee69936e
Internal identifier : 10254
Type of procedure : Negotiated without prior call for competition

2.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)

2.1.2 Place of performance

Postal address : Fysikvej, Bygning b309
Town : Lyngby
Postcode : 2800
Country subdivision (NUTS) : Københavns omegn ( DK012 )
Country : Denmark
Additional information : Bygning b309

2.1.4 General information

Legal basis :
Directive 2014/24/EU

5. Lot

5.1 Lot technical ID : LOT-0000

Title : Imaging Spectroscopic Nulling Ellipsometer
Description : DTU intends to order an imaging spectroscopic nulling ellipsometer for anisotropic refractive index measurements on materials with sample sizes down to few micrometers. The equipment should have the ability to: • Measure the uniaxial anisotropic complex refractive index of samples with thickness of around 100 nm, and determine both the refractive index and thickness with high accuracy • Provide spatial resolution down to 1 micrometer (at a wavelength of 400 nm) for measuring few-micron-sized samples, such as exfoliated 2D materials. • Provide variable angle imaging spectroscopic ellipsometry (from 38° to 90°, where 90° means transmis-sion mode). • Measure over a spectral range covering 190 nm – 1000 nm (UV-Vis), with the capability of being upgraded to extend into the near infrared (up to 1700 nm). • Measure samples on transparent substrates • Automate measurements over cm-scale areas (such as standard 4-inch wafers) • Be upgraded to Mueller Matrix measurements (for measuring biaxial samples). • Provide software for ellipsometric modelling.
Internal identifier : 10254

5.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)

5.1.2 Place of performance

Postal address : Fysikvej, Bygning b309
Town : Lyngby
Postcode : 2800
Country subdivision (NUTS) : Københavns omegn ( DK012 )
Country : Denmark
Additional information : Bygning b309

5.1.6 General information

The procurement is covered by the Government Procurement Agreement (GPA) : yes

5.1.15 Techniques

Framework agreement :
No framework agreement
Information about the dynamic purchasing system :
No dynamic purchase system

5.1.16 Further information, mediation and review

Review organisation : Klagenævnet for Udbud
Information about review deadlines : Complaint that the Contracting Authority, contrary to the Public Procurement Act, has concluded a contract without prior publication of a contract notice in the European Union Official Journal must be submitted no later than 30 calendar days from the date after a contract award notice has been published by the Contracting Authority in the European Union Official Journal and that contract award notice includes the grounds for the decision to award the contract directly, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, section 3.
Organisation providing additional information about the procurement procedure : Danmarks Tekniske Universitet - DTU
Organisation providing offline access to the procurement documents : Danmarks Tekniske Universitet - DTU
Organisation providing more information on the review procedures : Konkurrence- og Forbrugerstyrelsen
Organisation whose budget is used to pay for the contract : Danmarks Tekniske Universitet - DTU
Organisation executing the payment : Danmarks Tekniske Universitet - DTU
Organisation signing the contract : Danmarks Tekniske Universitet - DTU

6. Results

Value of all contracts awarded in this notice : 324 016 Euro
Direct award :
Justification for direct award : The contract can be provided only by a particular economic operator because of an absence of competition for technical reasons
Other justification : The combination of features required for DTU’s research activities is uniquely provided by the Accurion EP4 imag-ing spectroscopic nulling ellipsometer from supplier Park Systems Europe GmbH. In particular, the instrument of-fers the capability to measure the uniaxial anisotropic complex refractive index of samples with thicknesses of around 100 nm, at a spatial resolution down to 1 µm, across a broad spectral range from 190–1000 nm (UV-Vis), with the option to extend measurements into the near-infrared up to 1700 nm. This configuration is further com-plemented by the possibility of upgrading the system to perform full Mueller matrix measurements. This precise combination of capabilities, i.e., high spatial resolution, wide spectral coverage, anisotropy analysis on both transparent and opaque substrates, and an upgrade path for advanced polarization-resolved measure-ments, is not offered by other suppliers. These technical features are essential for DTU’s intended applications and cannot be substituted. A market survey has been conducted including six alternative suppliers of ellipsometry equipment. None of the contacted suppliers were able to provide an instrument that integrates the critical combination of specifications listed above. While several suppliers offer ellipsometers with partial overlap in capabilities (for example, wide spectral range but no few-micrometer-scale spatial resolution, or imaging capabilities with limited spectral range), none could deliver the full set of features required by DTU. Based on this market survey, it is concluded that the Accurion EP4 Imaging Spectroscopic Nulling Ellipsometer from Park Systems Europe GmbH is the only available solution that meets DTU’s research requirements.

6.1 Result lot ldentifier : LOT-0000

6.1.2 Information about winners

Winner :
Official name : Park Systems Europe GmbH
Tender :
Tender identifier : Offer - Imaging Spectroscopic Nulling Ellipsometer
Identifier of lot or group of lots : LOT-0000
Value of the tender : 324 016 Euro
Contract information :
Identifier of the contract : Contract
Date on which the winner was chosen : 28/08/2025
Organisation signing the contract : Danmarks Tekniske Universitet - DTU

8. Organisations

8.1 ORG-0001

Official name : Danmarks Tekniske Universitet - DTU
Registration number : 30060946
Postal address : Anker Engelunds Vej 1
Town : Kgs. Lyngby
Postcode : 2800
Country subdivision (NUTS) : Københavns omegn ( DK012 )
Country : Denmark
Contact point : Anna Storch
Telephone : +45 999999
Internet address : https://www.dtu.dk
Roles of this organisation :
Buyer
Organisation providing additional information about the procurement procedure
Organisation providing offline access to the procurement documents
Organisation signing the contract
Organisation whose budget is used to pay for the contract
Organisation executing the payment

8.1 ORG-0002

Official name : Klagenævnet for Udbud
Registration number : 37795526
Postal address : Nævnenes hus, Toldboden 2
Town : Viborg
Postcode : 8800
Country subdivision (NUTS) : Østjylland ( DK042 )
Country : Denmark
Telephone : +45 35291000
Internet address : http://www.klfu.dk
Roles of this organisation :
Review organisation

8.1 ORG-0003

Official name : Konkurrence- og Forbrugerstyrelsen
Registration number : 10294819
Postal address : Carl Jacobsens Vej 35
Town : Valby
Postcode : 2500
Country subdivision (NUTS) : Byen København ( DK011 )
Country : Denmark
Telephone : +45 41715000
Internet address : http://www.kfst.dk
Roles of this organisation :
Organisation providing more information on the review procedures

8.1 ORG-0004

Official name : Park Systems Europe GmbH
Registration number : DE311587684
Postal address : Schildkroetstrasse 15
Town : Mannheim
Postcode : 68199
Country subdivision (NUTS) : Mannheim, Stadtkreis ( DE126 )
Country : Germany
Contact point : Pier Paolo Aurino
Telephone : +46707956172
Roles of this organisation :
Tenderer
Winner of these lots : LOT-0000

8.1 ORG-0005

Official name : Mercell Holding ASA
Registration number : 980921565
Postal address : Askekroken 11
Town : Oslo
Postcode : 0277
Country subdivision (NUTS) : Oslo ( NO081 )
Country : Norway
Contact point : eSender
Telephone : +47 21018800
Fax : +47 21018801
Internet address : http://mercell.com/
Roles of this organisation :
TED eSender

Notice information

Notice identifier/version : 9516fe42-00ea-4a26-a561-b077810d3504 - 01
Form type : Direct award preannouncement
Notice type : Voluntary ex-ante transparency notice
Notice dispatch date : 28/08/2025 12:08 +00:00
Notice dispatch date (eSender) : 28/08/2025 13:00 +00:00
Languages in which this notice is officially available : English
Notice publication number : 00566249-2025
OJ S issue number : 165/2025
Publication date : 29/08/2025